Instrumentation for Low Temperature SPM
Recently manufactured coarse approach mechanism, "Walker" with 3 actuators for low temperature,
high vacuum coarse approach mechanism : By using extensional piezo actuator
rather than shear stack piezo, the material cost was reduced and compact design was obtained. It will be
used for Low temperature, UHV-SPM applications. This topic was presented on ISAMMA 2007 in Jeju, Korea.
Walker for low temperature SPM
- Experimental results of low temperature SPM
Dip probe type, Low temperature SPM using Tuning fork.
This probe is sealed by a brass vacuum can for vacuum environment, and is dipped into
liquid helium (or liquid nitrogen) to cool down to 4.2 K (77 K).
The tuning fork is located on top of the walker to detect the atomic force between tip
which is designed for wrist watch. Suprisingly, this simply
oscillator can be used as a core sensor for cutting-edge nanotechnology.
(a) Front view and (b) top view of CAD design of the walker for
Low-temperature High-vacuum SPM.
Sapphire and Alumina are key materials for sliding with low stiction in low temperature.
Topographic (a,c,e) and MFM (b, d, f) images. In the high
magnetic field, MFM images shows the interaction between the external magenetic field and local
internal stray field, in nanometer scale resolution.
At 4.2 K, the images (e,f) shows very detailed structures of local stray magnetic field.
Department of Nano Science and Technology, Sejong University